AuctionDetails

LAM 2300 Exelan Etch Sys

Private Negotiation Sale
Offered by Thomas Industries and Strategic Fab Services is one LAM 2300 Exelan Oxide Etch System.  The system was installed new in 2006 and has been Idled since 12/09/08.  Currently Installed and operational.
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LAM 2300 EXELAN OXIDE ETCH


LAM 2300 System Platform

  • S/N: 1001862-06-23-20257
  • 2006 vintage
  • 3 Open Cassette Load Stations
  • 25 Slot Input Buffer Station
  • Side and Front Monitor User Interface
  • UPS Circuitry
  • 100 Ft. TM-Subpanel Cable
  • Configured for 200mm Wafers, 300mm capable with kit change

 Qty 4 Exelan FLEX DD Process Modules

  • 1600 L/S Edwards Turbo Pump (One per chamber)
  • PM ISO Valve: Chemraz Rocker Valve (One per chamber)
  • NSR6254_A: BP Kit (One per chamber)
  • 2300 Exelan FLEX, IGS Type Gas Box (One per chamber) with 9 standard gas lines and 7 optional gas lines (16 total per chamber) with top exhaust and Qty. 16 Unit U8561 MFCs
  • Gasses: C4F8; NA; O2; CO; CH3F; H2; CH2F2; N2; CHF3; AR; HE; CF4
  • Chamber D down (vacuum pump), other three operational

 

Tool Idled 12/09/2008

Tool is installed and operational

Buyer responsible for deinstall, rigging and crating

Inspection available upon request

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